The mechanism of galvanic/metal-assisted etching of silicon

Authors

Kurt W. Kolasinski, West Chester University of PennsylvaniaFollow

Document Type

Article

Publication Date

2014

Publication Title

Nanoscale Research Letters

ISSN

1931-7573

Publisher

SpringerOpen

Volume

9

Issue

432

First Page

1

Last Page

8

DOI

10.1186/1556-276X-9-432

Recommended Citation

Kolasinski, K. W. (2014). The mechanism of galvanic/metal-assisted etching of silicon. Nanoscale Research Letters, 9(432), 1-8. http://dx.doi.org/10.1186/1556-276X-9-432